Purpose:

It is developed the "sol-gel" technology of protective quartz films production, that are used for manufacture of integrated microcircuits for surface protection against aggressive environments. The received protective film is transparent in a visible range, hydrophobic, possesses high adhesion to a surface of monocrystal silicon plates.

Coating specifications:

• The homogeneous transparent coating forms after heat treatment at temperature 200-500 ^oC
• Thickness of coatings: from 1 up to 3 microns
• Sizes of coatings: from 1 up to 11 cm in diameter
• Mechanical stability to temperature fluctuations
• Moisture- and corrosion stability
• Permittivity coefficient –10,5
• Value of an initial charge on border with silicon is about 2*10¹⁰ cm^-2
• Number of ions Na, K, Li - 10¹² at/cm²

Technical and economic advantages:

Decrease in labour input of technological processes, reduction of power expenses in comparison with vacuum methods of coatings drawings. 25 times decrease of cost of sol reception in comparison with the foreign analogues: USA (Allight Signal) and Russia (Elma, Zelenograd).

Commercial offer:

Manufacturing and delivery of experimental batches of products, transfer of technology on basis of license contract, rendering assistance on implementation